1982 International Conference on Solid State Devices

1982 International Conference on Solid State Devices

Aug 24 - Aug 26, 1982Sunshine City Prince Hotel, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1982 International Conference on Solid State Devices

1982 International Conference on Solid State Devices

Aug 24 - Aug 26, 1982Sunshine City Prince Hotel, Tokyo, Japan

[A-1-3]Epitaxial Silicide Films for Integrated Circuits and Future Devices

Seijiro FURUKAWA, Hiroshi ISHIWARA(1.Graduate School of Science and Engineering, Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.1982.A-1-3
Download PDFDownload PDF
Back