1982 International Conference on Solid State Devices
Aug 24 - Aug 26, 1982Sunshine City Prince Hotel, Tokyo, Japan
1982 International Conference on Solid State Devices
Aug 24 - Aug 26, 1982Sunshine City Prince Hotel, Tokyo, Japan
[B-3-3]A New Short Channel MOSFET with an Atomic-Layer-Doped Impurity-Profile (ALD-MOSFET)
Ken YAMAGUCHI, Yasuhiro SHIRAKI, Yoshifumi KATAYAMA, Yoshimasa MURAYAMA(1.Central Research Laboratory, Hitachi, Ltd.)
