1983 Conference on Solid State Devices and Materials
Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1983 Conference on Solid State Devices and Materials
Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[A-1-4]Fraction of Interstitialcy Mechanism in Impurity Diffusion in Silicon
Satoru Matsumoto, Yutaka Ishikawa, Tatsuya Niimi(1.Department of Electrical Engineering, Keio University, 2.Department of Applied Physics, Tokai University)
