1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-3-6]Characterization of 0.1 μm Thick Isolated Silicon Layers on Porous Oxidized Silicon

Kazuo Imai, Hideyuki Unno(1.Atsugi Electrical Communication Laboratory, NTT)
https://doi.org/10.7567/SSDM.1983.A-3-6
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