1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-2-3]Sidewall-Assisted Closely Spaced Electrode Technology for High Speed GaAs LSIs

Asamitsu Higashisaka, Masaoki Ishikawa, Fumiaki Katano, Shuji Asai, Takashi Furutsuka, Yoichiro Takayama(1.Microelectronics Research Laboratories, NEC Corporation)
https://doi.org/10.7567/SSDM.1983.B-2-3
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