1983 Conference on Solid State Devices and Materials
Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1983 Conference on Solid State Devices and Materials
Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[B-3-9]Local Modes from Si at Gallium and Arsenic Sites and Electrical Activation in Implanted GaAs
T. Nakamura, T. Katoda(1.Institute of Interdisciplinary Research Faculty of Engineering, The University of Tokyo)
