1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1983 Conference on Solid State Devices and Materials

1983 Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1983The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-4-4]High-Rate Deposition of a-Si:H Using SiH4

T. Hamasaki, M. Ueda, M. Hirose, Y. Osaka(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1983.B-4-4
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