1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan

[A-2-3]A High Contrast Submicron X-Ray Mask with Ta Absorber Patterns

M. Sekimoto, A. Ozawa, T. Ohkubo, H. Yoshihara(1.Atsugi Electrical Communication Laboratory, N.T.T.)
https://doi.org/10.7567/SSDM.1984.A-2-3
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