1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan

[A-2-4]Fine Pattern Difinition with Focused Ion Beams and Its Application to X-Ray Mask Fabrication

Toshihiko KANAYAMA, Masanori KOMURO, Hiroshi HIROSHIMA, Tsunehiro OHIRA, Nobufumi ATODA, Hisao TANOUE, Toshio TSURUSHIMA(1.Electrotechnical Laboratory)
https://doi.org/10.7567/SSDM.1984.A-2-4
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