1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan

[A-2-5]Characteristics of Selective Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo, Nobuyuki Takakura, Daisuke Takehara, Susumu Namba(1.Department of Electrical Engineering Faculty of Engineering Science, Osaka University)
https://doi.org/10.7567/SSDM.1984.A-2-5
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