1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan

[A-3-2]Via-Hole Filling with Molybdenum by RF Bias Sputtering

T. Mogami, M. Morimoto, H. Okabayashi(1.Microelectronics Research Labs., NEC Corporation)
https://doi.org/10.7567/SSDM.1984.A-3-2
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