1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan

[A-3-3]Self-Aligned Titanium Silicidation by Lamp Annealing

K. Tsukamoto, T. Okamoto, M. Shimizu, T. Matsukawa, H. Harada(1.LSI R&D Lab., Mitsubishi Electric Corp.)
https://doi.org/10.7567/SSDM.1984.A-3-3
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