1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan
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International Conference on Solid State Devices and Materials
1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

Aug 30 - Sep 1, 1984International Conference Center Kobe, Kobe, Japan

[B-2-5]Submicron Channel MOSFET Using Focused Boron Ion Beam Implantation into Silicon

Shoji SHUKURI, Yasuo WADA, Masao TAMURA, Hiroo MASUDA, Tohru ISHITANI(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1984.B-2-5
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