1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan

[A-1-3]Characterization and Performance Analysis of Masked LDD Transistor for CMOS VLSIs

Masaki Sato, Kuniyoshi Yoshikawa, Shigeru Atsumi, Seiichi Mori, Koji Makita, Akemi Omichi, Hiroshi Nozawa(1.Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)
https://doi.org/10.7567/SSDM.1985.A-1-3
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