1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
[A-1-4]A New Self-Aligned Contact Technology for LDD MOS Transistors
A. Shinohara, M. Fukumoto, G. Fuse, S. Odanaka, M. Sasago, T. Ohzone, T. Ishihara(1.Semiconductor Research Center Matsushita Electric Ind. Co., Ltd.)
