1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan

[A-1-6]Three Dimensional Leakage Current in Corrugated Capacitor Cells

Eiji TAKEDA, Kan TAKEUCHI, Atsushi HIRAIWA, Toru TOYABE, Hideo SUNAMI, Kiyoo ITOH(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1985.A-1-6
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