1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
[A-2-1]Recrystallization of SOI Structures by a 2-Dimensionally Scanned Pseudo-Line Electron Beam
Susumu Horita, Hiroshi Ishiwara(1.Graduate School of Science and Engineering, Tokyo Institute of Technology)
