1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
[A-2-2]Amplitude Modulated Pseudo-Line Electron Beam Recrystallization for Large Area SOI Growth
T. Hamasaki, T. Inoue, I. Higashinakagawa, T. Yoshii, M. Kashiwagi, H. Tango(1.VLSI Research Center, Toshiba Corporation)
