1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan

[A-2-4]Orientation Controlled SOI by Line-Shaped Laser-Beam Seeded Lateral Epitaxy for CMOS Stacking

M. Ohkura, K. Kusukawa, H. Sunami, T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1985.A-2-4
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