1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan

[A-3-3]Laser-Assisted Chemical Vapor Deposition of Stoichiometric Boron Nitride

Shin Yokoyama, Yasuhiro Yamakage, Masataka Hirose(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1985.A-3-3