1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan

[A-3-6]ArF Excimer Laser-Enhanced Oxidation of Silicon in O2/NF3 Gas Mixture

Mizuho Morita, Seiichi Aritome, Masataka Hirose(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1985.A-3-6
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