1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan

[A-3-7]SiO2 Photo-CVD Using Reactive Oxygen by Double Light Excitation

Masanori OKUYAMA, Kohji INOUE, Masanori MICHIMORI, Yoshihiro HAMAKAWA(1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)
https://doi.org/10.7567/SSDM.1985.A-3-7
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