1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
1985 Conference on Solid State Devices and Materials
Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
[A-3-9]Direct Writing of Highly Conductive MO Lines by Laser Induced CVD
Fumihiko Uesugi, Hiroyuki Yokoyama, Shunji Kishida(1.Opto-Electronics Research Laboratories, NEC Corporation)
