1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1985Nippon Toshi Center, Tokyo, Japan

[C-1-1]A New Thermal CVD Method to Prepare High Quality Amorphous Silicon

Hideki Matsumura, Hiroyuki Tachibana, Hisanori Ihara(1.Department of Physical Electronics, Hiroshima University)
https://doi.org/10.7567/SSDM.1985.C-1-1
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