1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
[A-3-2]The Orientation Dependence of Impurity Sticking on Si Molecular Beam Epitaxy
Naoto Matsuo, Yuichi Hirofuji(1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)
