1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan

[A-3-4]Low Pressure Silicon Epitaxy Using Si2H6

Fumitake MIENO, Yuji FURUMURA, Mamoru MAEDA(1.Process Engineering Dept. Semiconductors Group Fujitsu Ltd.)
https://doi.org/10.7567/SSDM.1986.A-3-4
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