1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
[A-3-5]Low Temperature Low Pressure Silicon Epitaxial Growth and Its Application to Advanced Dielectric Isolation Technology
John O. Borland, Dennis N. Schmidt, Alan R. Stivers(1.Epi Applications Laboratory Applied Materials, Inc., 2.Silicon Device Development Westinghouse R&D Center, 3.Technology Development Intel Corporation)
