1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan

[A-4-1]Laser Induced Gas-Surface Chemistry and Photoetching of Solids

T. J. Chuang(1.IBM Almaden Research Center)
https://doi.org/10.7567/SSDM.1986.A-4-1
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