1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
[B-1-2]Advanced OSELO Isolation with Shallow Grooves for Three-quarter Micron ULSIs
Toru KAGA, Yoshifumi KAWAMOTO, Shin-pei IIJIMA, Yoshimi SUDOH, Yoshio SAKAI(1.CENTRAL RESEARCH LABORATORY, HITACHI Ltd.)
