1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
1986 International Conference on Solid State Devices and Materials
Aug 20 - Aug 22, 1986Tokyo Prince Hotel, Tokyo, Japan
[C-3-2]UV Cleaning Effect of GaAs Surface in NH3 Gas Prior to Photo CVD
N. Yoshida, K. Mizuguchi, T. Murotani, K. Fujikawa(1.LSI R&D Laboratory, Mitsubishi Electric Corporation)
