1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1987Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1987Nippon Toshi Center, Tokyo, Japan

[A-1-4]MeV-Boron Implanted Buried Barrier for Soft Error Reduction in Megabit DRAM

Y. Matsuda, K. Tsukamoto, M. Inuishi, M. Shimizu, M. Asakura, K. Fujishima, J. Komori, Y. Akasaka(1.LSI R&D Lab. Mitsubishi Electric Corp.)
https://doi.org/10.7567/SSDM.1987.A-1-4
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