1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1987Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

Aug 25 - Aug 27, 1987Nippon Toshi Center, Tokyo, Japan

[A-2-1]The Improvement of LDD MOSFET's Characteristics by the Oblique-Rotating Ion Implantation

T. Eimori, H. Ozaki, H. Oda, S. Ohsaki, J. Mitsuhashi, S. Satoh, T. Matsukawa(1.LSI R & D Laboratory, Mitsubishi Electric Corp.)
https://doi.org/10.7567/SSDM.1987.A-2-1
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