1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-1-1]Experimental Technology and Performance of 0.1μm Gate-Length Low Temperature Operation MOSFETs
G. A. Sai-Halasz(1.IBM Research Division, T. J. Watson Research Center)
