1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-1-4]A New Device Structure Utilizing Atomic Layer Doping (ALD) Technology in Si Systems
Ken YAMAGUCHI, Kiyokazu NAKAGAWA, Yasuhiro SHIRAKI(1.Central Research Laboratory, Hitachi Ltd., 2.Research Center for Advanced Science and Technology University of Tokyo)
