1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-3-2]Very-Low-Temperature Epitaxial Silicon Growth by Low-Kinetic-Energy Particle Bombardment
Tadahiro Ohmi, Kiyohiko Matsudo, Tadashi Shibata Takeshi Ichikawa, Hiroshi Iwabuchi(1.Department of Electronics, Faculty of Engineering Tohoku University)
