1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-4-1]Selective Growth of Polycrystalline Silicon by Laser-Induced Cryogenic CVD
Takeshi TANAKA, Koji DEGUCHI, Seiichi MIYAZAKI, Masataka HIROSE(1.Department of Electronics, Hiroshima Institute of Technology, 2.Department of Electrical Engineering, Hiroshima University)
