1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-4-2]Effects of Magnetic Fields and Excited Plasma Species on Silicon Oxide Film Formation by Microwave Plasma CVD
Takuya Fukuda, Kazuo Suzuki, Yasuhiro Mochizuki, Michio Ohue, Naohiro Momma, Tadashi Sonobe(1.Hitachi Research Laboratory and Hitachi Works, Hitachi Ltd.)
