1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[A-4-3]Growth of SiO2 Thin Film by Photo-CVD Using 123nm VUV Light

Kohji INOUE, Masanori OKUYAMA, Yoshihiro HAMAKAWA(1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)
https://doi.org/10.7567/SSDM.1988.A-4-3
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