1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[A-4-4]Reaction Mechanisms with Synchrotron Radiation-Stimulated Etching of Si and SiO2

Jun-ichi Takahashi, Yuichi Utsumi, Tsuneo Urisu(1.NTT LSI Laboratories)
https://doi.org/10.7567/SSDM.1988.A-4-4
Download PDFDownload PDF
Back