1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[A-5-3]Tungsten Plug Technology: Substituting Tungsten for Silicon Using Tungsten Hexaflouride

Nobuyoshi Kobayashi, Masayuki Suzuki, Masayoshi Saitou(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1988.A-5-3
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