1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-5-4]Evaluation of Laser CVD Tungsten for Gate Electrode
Hideaki Matsuhashi, Satosi Nishikawa, Seigo Ohno(1.Semiconductor Technology Laboratory, OKI Electric Industry Co., Ltd.)
