1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[A-5-5]TiSi2 and TiN Formation by Ti-Ion Implantation and Their Application to MOS Devices

Yasuhisa Omura, Hiroshi Inokawa, Katsutoshi Izumi(1.NTT LSI Laboratories)
https://doi.org/10.7567/SSDM.1988.A-5-5
Download PDFDownload PDF
Back