1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-7-3]Lateral Diffusion of Dopants beyond Preamorphized Region
T. IZAWA, M. KASE, H. MORI, K. KOBAYASHI, M. NAKANO(1.Advanced Tech. Division and Process Development Division, FUJITSU LTD.)
