1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[A-7-4]Impurity Doping into Single and Poly Crystalline Silicon by a Large Area Ion Doping Technique

Akihisa YOSHIDA, Masatoshi KITAGAWA, Kentaro SETSUNE, Takashi HIRAO(1.Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.)
https://doi.org/10.7567/SSDM.1988.A-7-4
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