1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[A-8-1]Excimer Laser Doping for Sub-Micron Device Fabrication

H. Tomita, M. Negishi, T. Sameshima, H. Hayashi, S. Usui(1.Sony Research Center and, 2.Sony Semiconductor Group R. and D. Department)
https://doi.org/10.7567/SSDM.1988.A-8-1
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