1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[A-9-6]Characterization of Silicon Bipolar Devices Fabricated Using Very-Low-Temperature Plasma Process
Tadashi SAITOH, Masao KONDO, Tsuyoshi UEMATSU, Masao TAMURA(1.Central Research Laboratory, Hitachi, Ltd.)
