1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
1988 International Conference on Solid State Devices and Materials
Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
[B-1-4]A Reliable Profiled Lightly-Doped Drain(PLD) Cell for High Density Submicron EPROMS and Flash EEPROMS
Kuniyoshi YOSHIKAWA, Masaki SATO, Yoichi OHSHIMA(1.Semiconductor Device Engineering Laboratory, TOSHIBA Corporation)
