1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[B-1-6]Inter-Poly SiO2/Si3N4 Capacitor Films 5nm Thick for Deep Submicron LSIs

J. Yugami, T. Mine, S. Iijima, A. Hiraiwa(1.CENTRAL RESEARCH LABORATORY, HITACHI, LTD.)
https://doi.org/10.7567/SSDM.1988.B-1-6
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