1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[C-1-1]Effect of Annealing on the SOI Structure Formed by Large Dose Oxygen Implantation

Nan-Xiang Chen, Wei Miao, Zhong-Lie Wang, Chang Huang(1.Inst. of Low Energy Nuclear Physics, Beijing Normal University, 2.Shaanxi Eishan Micro-Electronics Institute)
https://doi.org/10.7567/SSDM.1988.C-1-1
Download PDFDownload PDF
Back