1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[C-1-3]Crystal Defect Study of Solid Phase Epitaxially Grown Si Surrounded by SiO2 Structures

Eiichi Murakami, Masao Tamura, Kikuo Kusukawa, Masahiro Moniwa, Terunori Warabisako, Masanobu Miyao(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1988.C-1-3